CIQTEK SEM5000X
Ultra-high Resolution Field Emission Scanning Electron Microscopy (FESEM) Challenges the Limits
The CIQTEK SEM5000X is an ultra-high resolution FESEM with optimized electron optics column design, reducing overall aberrations by 30%, achieving ultra-high resolution of 0.6 nm@15 kV and 1.0 nm@1 kV. Its high resolution and stability make it advantageous in advanced nano-structural materials research, as well as the development and manufacturing of high-technology node semiconductor IC chips.
Key Features:
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CIQTEK SEM5000X
Ultra-high Resolution Field Emission Scanning Electron Microscopy (FESEM) Challenges the Limits
The CIQTEK SEM5000X is an ultra-high resolution FESEM with optimized electron optics column design, reducing overall aberrations by 30%, achieving ultra-high resolution of 0.6 nm@15 kV and 1.0 nm@1 kV. Its high resolution and stability make it advantageous in advanced nano-structural materials research, as well as the development and manufacturing of high-technology node semiconductor IC chips.
Key Features:
| CIQTEK SEM5000X FESEM Microscope Specifications | ||
| Electron Optics | Resolution | 0.6 nm @ 15 kV, SE |
| 1.0 nm @ 1 kV, SE | ||
| Acceleration Voltage | 0.02kV ~30 kV | |
| Magnification | 1 ~ 2,500,000 x | |
| Electron Gun Type | Schottky Field Emission Electron Gun | |
| Specimen Chamber | Cameras | Dual Cameras (optical navigation + chamber monitor) |
| Stage Type | 5-Axis Mechanical Eucentric Specimen Stage | |
| Stage Range | X=110 mm, Y=110 mm, Z=65 mm | |
| T: -10*~+70°, R: 360° | ||
| SEM Detectors and Extensions | Standard | In-lens Detector |
| Everhart-Thornley Detector (ETD) | ||
| Optional | Retractable Back-Scattered Electron Detector (BSED) | |
| Retractable Scanning Transmission Electron Microscopy Detector (STEM) | ||
| Low Vacuum Detector (LVD) | ||
| Energy Dispersive Spectrometer (EDS / EDX) | ||
| Electron Backscatter Diffraction Pattern (EBSD) | ||
| Specimen Exchange Loadlock (4 inch / 8 inch) | ||
| Trackball & Knob Control Panel | ||
| Duo-Dec mode (Duo-Dec) | ||
| User Interface | Languages | English |
| Operating System | Windows | |
| Navigation | Optical Navigation, Gesture Quick Navigation, Trackball (optional) | |
| Automatic Functions | Auto Brightness & Contrast, Auto Focus, Auto Stigmator | |
