CIQTEK SEM5000Pro
High Resolution under Low Excitation
The CIQTEK SEM5000Pro is a Schottky field emission scanning electron microscope (FE-SEM) specialized at high resolution even under low excitation voltage. Employing an advanced “Super-Tunnel” electron optics technology facilitates a crossover-free beam path together with an electrostatic-electromagnetic compound lens design.
Key Features:
These advancements reduce spatial charging effect, minimize lens aberrations, enhance imaging resolution at low voltage, and achieve a resolution of 1.2 nm at 1 kV, which allows for direct observation of non-conductive or semi-conductive samples, effectively reducing sample irradiation damage.
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CIQTEK SEM5000Pro
High Resolution under Low Excitation
The CIQTEK SEM5000Pro is a Schottky field emission scanning electron microscope (FE-SEM) specialized at high resolution even under low excitation voltage. Employing an advanced “Super-Tunnel” electron optics technology facilitates a crossover-free beam path together with an electrostatic-electromagnetic compound lens design.
These advancements reduce spatial charging effect, minimize lens aberrations, enhance imaging resolution at low voltage, and achieve a resolution of 1.2 nm at 1 kV, which allows for direct observation of non-conductive or semi-conductive samples, effectively reducing sample irradiation damage.
Key Features:
Highlights:
★ “Super Tunnel” electron optics column technology/in-lens beam deceleration
Decrease spatial charging effect, ensuring low voltage resolution.
★ Crossover-free in the electron beam path
Effectively reduce lens aberrations and improve resolution.
★ Electromagnetic & electrostatic compound objective lens
Reduce aberrations, significantly improve resolution at low voltages, and enable observation of magnetic samples.
★ Water-cooled constant-temperature objective lens
Ensure the stability, reliability, and repeatability of the objective lens operation.
★ Variable multi-hole aperture with electromagnetic beam deflection system
Automatic switching between apertures without mechanical motion, allowing fast switching between imaging modes.
| CIQTEK FESEM Microscope SEM5000Pro Specifications | ||
| Electron Optics | Resolution | 0.8 nm @ 15 kV, SE |
| 1.2 nm @ 1.0 kV, SE | ||
| Acceleration Voltage | 0.02kV ~ 30 kV | |
| Magnificationn (Polaroid) | 1 ~ 2,500,000 x | |
| Electron Gun Type | Schottky Field Emission Electron Gun | |
| Specimen Chamber | Camera | Dual Cameras (Optical navigation + chamber monitor) |
| Stage Range | X: 110 mm, Y: 110 mm, Z: 50 mm | |
| T: -10°～ +70°, R: 360° | ||
| SEM Detectors and Extensions | Standard | Inlens Electron Detector |
| Everhart-Thornley Detector (ETD) | ||
| Optional | Retractable Backscattered Electron Detector (BSED) | |
| Retractable Scanning Transmission Electron Microscope(STEM) | ||
| Low Vacuum Detector（LVD） | ||
| Energy Dispersive Spectroscopy (EDS / EDX) | ||
| Electron Backscatter Diffraction Pattern (EBSD) | ||
| Specimen Exchange Loadlock （4 inch /8 inch) | ||
| Trackball & Knob Control Panel | ||
| Software | Language | English |
| Operating System | Windows | |
| Navigation | Optical Navigation, Gesture Quick Navigation, Trackball (optional) | |
| Automatic Functions | Auto Brightness & Contrast, Auto Focus, Auto Stigmator | |
