Safematic CCU-010 LV
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Safematic CCU-010 HV
The Safematic CCU-010 HV high vacuum sputter and carbon coater was designed for the highest demands in the field of sample preparation. Premium components and a smart design allow excellent results in ultra-high-resolution applications. Our device is a compact, fully automatic sputter coater and/or carbon coater. The CCU-010 HV base unit pumping system is oil-free and includes a high-performance turbo pump and diaphragm backing pump, both internally located, giving the coater a very small footprint (no cumbersome rotary pump and vacuum lines). It is a mini sputter coater, size-wise, with big potential. The use of an oil-free, pumping system reduces contamination or defects in the coating to a minimum. The device can be kept under vacuum when switched off. This efficiently protects the system from dust and humidity and creates a fast pumping speed and proper vacuum conditions for high-quality coatings.
A Sputter coater and/or carbon coater with options for plasma treatment within one device? Yes, this is possible with our tabletop vacuum coating system. By simply changing the process head, you can easily configure the unit for all these applications. Adjust the unit to your requirements or extend the functionality afterwards. A coating thickness monitor close to the sample is a standard fitting which will precisely monitor and control the film thickness of carbon and metal films.
The use of high-quality materials and components in combination with innovative ideas produces extraordinarily short process times. Create recipes via the modern user interface and use the automatic mode for reliable and reproducible production of thin coatings.
The efficient gas control optimised for high vacuum reduces the consumption of your process gas. With a target diameter of 54 mm and high target utilisation, you save money on consumables.
Save valuable laboratory space thanks to small dimensions. Weight has been minimised to reduce transport costs. Standardised small-flange quick connections („ISO-KF“) act as interfaces with your connections.
Unpack, connect, start! Do away with high start-up costs. The plug-and-play concept allows you to start up the device yourself. You only need to connect the power supply and the process gas. The service technician can run a quick error analysis thanks to the integrated USB service interface. The modular set-up allows for the targeted replacement of defective components.
| Dimensions (L x W x H) | 570 x 360 x 350 mm |
| Weight | 29 kg |
| Glass cylinder | Ø 120 mm (DN 100 ISO-KF compatible) |
| Implosion guard | Plastic splinter shield around the glass receptacle |
| Targets | Ø 54 mm and thickness up to 3 mm |
| Coating time | 0.5 … 990 s |
| Coating current | 10 … 100 mA (higher currents upon request) |
| Final vacuum | < 2 · 10–6 mbar |
| Vacuum measuring system | Pirani and cold cathode measuring system |
| Display | 115 x 86 mm, TFT graphical display |
| Sample table | Ø 80 mm, holds numerous sample plates Height adjustment 0 … 50 mm Tilt 0 … 45° |
| Double-quartz system | Piezoelectric crystal: Frequency 6 MHz, Ø 14 mm, thickness 0.4 mm Measuring frequency depends on coating thickness |
| Pump system | Integrated membrane and turbo pump |
| Connections, electrical | Device plug C14, 90-260 VAC, 47..63 Hz, 500 W |
| Connections, gas | Process gas: Ø 6mm, venting gas: Ø 6mm, plasma gas: Ø 6mm |
