The ZEM Series Desktop SEM-EDS Integration System combines sample morphology characterisation and elemental analysis functions. It is compact, easy to operate, and does not require a special environment for installation. It can work simply by being placed on a table and connected to power.

The ZEM Series Desktop SEM-EDS Integration Machine features a self-developed tungsten filament electron gun with an adjustable acceleration voltage ranging from 1-15kV, combined with a secondary electron detector, backscattered electron detector, and an integrated Oxford energy spectrometer, satisfying both morphology observation and elemental analysis needs.

Energy Spectrometer Parameters

• Integrated Oxford Xplore Compact 30 EDS Analysis System with a Super ATW window and a 30mm² active area
• Resolution better than 129eV (at MnKα) without liquid nitrogen cooling
• Elemental analysis range: B5-Cf98
• Point, line, and area scanning analysis

SEM Host Machine Features

• Vacuum Separation Technology: Utilises a unique vacuum design where the electron gun and sample chamber have separate vacuums, allowing for sample change in less than 1 minute.
• Extra-Large Sample Chamber: Provides a larger sample storage space for convenient user operation.
• Ultra-High Resolution: Achieves a maximum magnification of 360,000 times with a resolution of 5nm at 20kV.
• Standard Equipped Deceleration Mode: Enables observation of weakly conductive samples without gold sputtering.
• In-Chamber Camera: The sample chamber is equipped with a high-definition camera for real-time monitoring of sample changes during in-situ experiments.