Room Temperature Automatic Probe Station TZ-H-06

Room Temperature Automatic Probe Stage, High Reliability Probe Stage System, is mainly used in scientific research fields such as semiconductor/microelectronics, electronics, electromechanics, physics, chemistry, materials, optoelectronics, nano, microelectromechanics/MEMs, biochips, aerospace and other scientific research fields, as well as in the production and manufacturing fields of IC design/manufacturing/testing/packaging, LEDs, LCDs/OLEDs, LDs/PDs, PCBs, FPCs and other production and manufacturing fields.

Aiming to seek a balance between budget and high measurement reliability, the platform is equipped with a high-precision displacement stage, which can be automatically adjusted in the X, Y, Z and R directions, and each moving axis can be positioned with an accuracy of ±0.005mm or less, allowing fast and accurate measurements of array-type measurement features.

Economical and practical, strong stability, upgradeable and expandable, easy to operate are the core values of this product, which is widely used in universities, research institutes and the semiconductor industry.

Product features

• Standard with 4 probe arms, can provide 4-8 probe arms.
• Adjustable range of 50mm*50mm*30mm, the adjustment accuracy is better than 5um.
• Each probe arm is equipped with a Triax tri-coaxial low-leakage cable and probe.
• An additional Triax cable is provided for the base of the sample stage.
• Continuously variable monocular microscope, optical magnification: 0.5X~5.0X (with 1X additional objective lens), video magnification ~700X.
• Optional 2X additional objective lens. Resolution better than 2um.
• Full HD digital camera with coaxial illumination and ring illumination, with mechanical and optical focusing;
• Sample holder with motor drive for fast sample finding under the eyepiece, adjustment range: 100mm*100mm*15mm*±180°.