Linear Piezo Nano Displacement Stage ML-15A

Piezo-driven Nano Displacement Stage, using piezoelectric ceramics as the motion actuating element, can achieve the smallest step size at the sub-nanometer level within a range of hundreds of millimetres, thus solving the problem of the traditional Nano Stage with small travel and low precision of micrometre motorised stage differentiation.

It has a wide range of applications in the scientific research market, semiconductor market, advanced manufacturing industry, biomedical industry, optics, communications and other industries.

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Linear Piezo Nano Displacement Stage ML-15A

The Piezo-driven Nano Displacement Stage uses piezoelectric ceramics as the motion actuating element. It can achieve the smallest step size at the sub-nanometre level within a range of hundreds of millimetres. Thus, it solves the problem of the traditional Nano Stage with small travel. In addition, it addresses the low precision of micrometre motorised stage differentiation.

It has a wide range of applications in the scientific research market, semiconductor market, advanced manufacturing industry, biomedical industry, optics, communications and other industries.

ZEPTOOLS precision instruments R & D team independently developed the piezoelectric drive Nano Displacement Stage. The movement operates without lubrication and is vacuum compatible. Moreover, it can be used in the liquid helium temperature zones, from -269 degrees Celsius to room temperature, in a wide range of temperature zones, with the advantages.

With dual operating modes of stepping and scanning, it achieves sub-nanometre resolution positioning in the macro travel range.
The linear piezoelectric Nano Displacement Stage ML-15A not only has a compact mounting size, but also has a low-temperature vacuum and other application environments. Therefore, it is the preferred product for high-precision positioning with large travel in a small space. Customised Nano Displacement Stage is supported.

Product Advantages
  • Compact structure, high rigidity
  • Zero clearance, high precision, flexible hinge guidance system
  • Room temperature to liquid helium operating temperature, ultra-high vacuum compatible
  • Piezoceramic actuator with long service life
  • Closed-loop position and velocity control with a displacement sensor
Application Cases
  • Electron microscope in-situ nanoprobe stage
  • Semiconductor chip inspection
  • Photolithography workpiece stage
  • Microbial manipulator
  • Fibre optic welding
  • Ultra-precision assembly
  • Precision inspection and measurement
  • High-precision laser focusing

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