Ciqtek – High-Speed SEM | HEM6000

CIQTEK High-Speed SEM HEM6000

High-speed Scanning Electron Microscope for Cross-scale Imaging of Large-volume Specimens.

CIQTEK HEM6000 facilities technologies such as the high-brightness large-beam current electron gun, high-speed electron beam deflection system, high-voltage sample stage deceleration, dynamic optical axis, and immersion electromagnetic & electrostatic combo objective lens to achieve high-speed image acquisition whilst ensuring nano-scale resolution.

The automated operation process is designed for applications that require a more efficient and smarter large-area high-resolution imaging workflow. The imaging speed can reach over 5 times faster than a conventional field emission scanning electron microscope (FESEM).

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CIQTEK High-Speed SEM HEM6000

High-speed Scanning Electron Microscope for Cross-scale Imaging of Large-volume Specimens.

The CIQTEK High-Speed SEM HEM6000 facilitates technologies such as the high-brightness large-beam current electron gun, high-speed electron beam deflection system, high-voltage sample stage deceleration, dynamic optical axis, and immersion electromagnetic & electrostatic combo objective lens to achieve high-speed image acquisition whilst ensuring nano-scale resolution.

The automated operation process is designed for applications that require a more efficient and smarter large-area high-resolution imaging workflow. The imaging speed can reach over 5 times faster than a conventional field emission scanning electron microscope (FESEM).

Key Features:

  • High-Speed Scanning Driver – Dwell time 10 ns/pixel, maximum imaging acquisition speed 2*100M pixel/s.
  • Signal Electron Filtering System – SE/BSE signal-free switching, mixing with adjustable ratio.
  • Fully Electrostatic High-Speed Beam Deflection System – High-resolution large field imaging achievable maximum field of view up to 64um*64um at 4 nm per pixel.
  • Sample Stage Deceleration Technology – Reduce incident electron landing voltage, increasing signal electron capturing efficiency.
  • Electromagnetic & Electrostatic Combo Immersion Objective Lens Beam Deflection System – Objective lens magnetic field immerses sample, contributes low-aberration high-resolution imaging.
HEM6000-Semi HEM6000-Bio HEM6000-Lit
Low voltage & high resolution Low voltage & high resolution Simplified operation
Large field of view Various automated algorithms for the biological field Abundant selection options
Specially optimized algorithms for easy alignment of highly repetitive specimens BSE Detector Optimized for biological applications  High-speed automated workflow
Five-stage electrostatic deflection Biological 3D reconstruction system

Highlights:

  • High-speed Automation – Fully automatic sample loading & offloading process and image acquisition operation, which makes the overall imaging speed 5 times faster than that of conventional FESEM.
  • Large Field of View – Technology that dynamically shifts the optical axis according to the scanning deflection range, and achieves minimum edge distortion.
  • Low Imaging Distortion – Specimen stage tandem deceleration technology, achieves low landing energy, whilst obtaining high-resolution images.
CIQTEK High-speed SEM Microscope HEM6000 Specifications HEM6000-Semi HEM6000-Bio HEM6000-Lite
Electron Optics Resolution 1.5 nm@1 kV SE 1.8 nm@1 kV BSE 1.5 nm@15 kV BSE
Accelerating Voltage 0.1 kv~6 kV (Deceleration mode) 6 kV~30 kV (None-decel mode) 6 kV~30 kV
Magnification 66~1,000,000x
 Electron Gun High brightness Schottky field emission electron gun
Type of Objective Lens Immersion electromagnetic & electrostatic combo objective lens
Electrostatic Deflector Five-stage Four-stage Four-stage
Sample Loading System Vacuum System Fully automatic oil-free vacuum system
Specimen Monitoring Horizontal main chamber monitoring camera; vertical sample exchange load-lock chamber monitoring camera
Maximum Sample Size 4 inches in diameter
Specimen Stage Type Motorized 3-axis specimen stage (*optional piezoelectric driven specimen stage)
Specimen Stage Travel Rang X, Y: 110 mm; Z: 16 mm
Specimen Stage Repeatability X:±0.6 μm;Y:±0.3 μm
Specimen Exchange Full automatic
Sample Exchanging Duration <15 minutes
Loadlock Chamber Cleaning Fully automatic plasma cleaning system
Image Acquisition and Processing Dwell Time 10 ns/pixel
Acquisition Speed 2*100 M pixel/s
 Image Size 16 K*16 K
Detector & Accessories Low Angle Retractable Back-scattered Electron Detector Optional None Standard
Low Angle Back-scattered Electron Detector, Lower mounted Optional Standard None
In-column Overall Electron Detector Standard Optional Optional
In-column High-angle Backscattered Electron Detector Optional Optional Optional
Piezoelectric Driven Specimen Stage Optional Optional Optional
High Resolution Large FOV Mode (SW) Optional None None
Loadlock Chamber Plasma Cleaning System Optional Optional Optional
6-inch Specimen Loading System Optional Optional Optional
Active Anti-vibration Platform Optional Optional Optional
Al Noise Reduction; Large Area Field Stitching; 3D Reconstruction Optional Optional Optional
User Interface Language English
OS Windows
Navigation Optical navigation, gesture navigation
Automatic Function Automatic sample recognition, automatic imaging area selection, automatic brightness & contrast, automatic focus, automatic stigmator

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