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CIQTEK High-Speed SEM HEM6000
High-speed Scanning Electron Microscope for Cross-scale Imaging of Large-volume Specimens.
CIQTEK HEM6000 facilities technologies such as the high-brightness large-beam current electron gun, high-speed electron beam deflection system, high-voltage sample stage deceleration, dynamic optical axis, and immersion electromagnetic & electrostatic combo objective lens to achieve high-speed image acquisition whilst ensuring nano-scale resolution.
The automated operation process is designed for applications that require a more efficient and smarter large-area high-resolution imaging workflow. The imaging speed can reach over 5 times faster than a conventional field emission scanning electron microscope (FESEM).
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CIQTEK High-Speed SEM HEM6000
High-speed Scanning Electron Microscope for Cross-scale Imaging of Large-volume Specimens.
The CIQTEK High-Speed SEM HEM6000 facilitates technologies such as the high-brightness large-beam current electron gun, high-speed electron beam deflection system, high-voltage sample stage deceleration, dynamic optical axis, and immersion electromagnetic & electrostatic combo objective lens to achieve high-speed image acquisition whilst ensuring nano-scale resolution.
The automated operation process is designed for applications that require a more efficient and smarter large-area high-resolution imaging workflow. The imaging speed can reach over 5 times faster than a conventional field emission scanning electron microscope (FESEM).
Key Features:
HEM6000-Semi | HEM6000-Bio | HEM6000-Lit |
Low voltage & high resolution | Low voltage & high resolution | Simplified operation |
Large field of view | Various automated algorithms for the biological field | Abundant selection options |
Specially optimized algorithms for easy alignment of highly repetitive specimens | BSE Detector Optimized for biological applications | High-speed automated workflow |
Five-stage electrostatic deflection | Biological 3D reconstruction system |
Highlights:
CIQTEK High-speed SEM Microscope HEM6000 Specifications | HEM6000-Semi | HEM6000-Bio | HEM6000-Lite | |
Electron Optics | Resolution | 1.5 nm@1 kV SE | 1.8 nm@1 kV BSE | 1.5 nm@15 kV BSE |
Accelerating Voltage | 0.1 kv~6 kV (Deceleration mode) | 6 kV~30 kV (None-decel mode) | 6 kV~30 kV | |
Magnification | 66~1,000,000x | |||
Electron Gun | High brightness Schottky field emission electron gun | |||
Type of Objective Lens | Immersion electromagnetic & electrostatic combo objective lens | |||
Electrostatic Deflector | Five-stage | Four-stage | Four-stage | |
Sample Loading System | Vacuum System | Fully automatic oil-free vacuum system | ||
Specimen Monitoring | Horizontal main chamber monitoring camera; vertical sample exchange load-lock chamber monitoring camera | |||
Maximum Sample Size | 4 inches in diameter | |||
Specimen Stage Type | Motorized 3-axis specimen stage (*optional piezoelectric driven specimen stage) | |||
Specimen Stage Travel Rang | X, Y: 110 mm; Z: 16 mm | |||
Specimen Stage Repeatability | X:±0.6 μm;Y:±0.3 μm | |||
Specimen Exchange | Full automatic | |||
Sample Exchanging Duration | <15 minutes | |||
Loadlock Chamber Cleaning | Fully automatic plasma cleaning system | |||
Image Acquisition and Processing | Dwell Time | 10 ns/pixel | ||
Acquisition Speed | 2*100 M pixel/s | |||
Image Size | 16 K*16 K | |||
Detector & Accessories | Low Angle Retractable Back-scattered Electron Detector | Optional | None | Standard |
Low Angle Back-scattered Electron Detector, Lower mounted | Optional | Standard | None | |
In-column Overall Electron Detector | Standard | Optional | Optional | |
In-column High-angle Backscattered Electron Detector | Optional | Optional | Optional | |
Piezoelectric Driven Specimen Stage | Optional | Optional | Optional | |
High Resolution Large FOV Mode (SW) | Optional | None | None | |
Loadlock Chamber Plasma Cleaning System | Optional | Optional | Optional | |
6-inch Specimen Loading System | Optional | Optional | Optional | |
Active Anti-vibration Platform | Optional | Optional | Optional | |
Al Noise Reduction; Large Area Field Stitching; 3D Reconstruction | Optional | Optional | Optional | |
User Interface | Language | English | ||
OS | Windows | |||
Navigation | Optical navigation, gesture navigation | |||
Automatic Function | Automatic sample recognition, automatic imaging area selection, automatic brightness & contrast, automatic focus, automatic stigmator |
AVAILABLE IN STOCK
AVAILABLE IN STOCK
AVAILABLE IN STOCK
AVAILABLE IN STOCK