Ciqtek – FESEM | SEM5000Pro

CIQTEK SEM5000Pro

High Resolution under Low Excitation

The CIQTEK SEM5000Pro is a Schottky field emission scanning electron microscope (FE-SEM) specialized at high resolution even under low excitation voltage. Employing an advanced “Super-Tunnel” electron optics technology facilitates a crossover-free beam path together with an electrostatic-electromagnetic compound lens design.

Key Features:

  • Low Voltage High Resolution
  • High Stability
  • In-lens Electron Detector
  • Optional Specimen Exchange Loadlock (8 inches compatible)
  • Electromagnetic Beam Deflection with Multi-hole Apertures
  • Excellent Expandability

These advancements reduce spatial charging effect, minimize lens aberrations, enhance imaging resolution at low voltage, and achieve a resolution of 1.2 nm at 1 kV, which allows for direct observation of non-conductive or semi-conductive samples, effectively reducing sample irradiation damage.

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CIQTEK SEM5000Pro

High Resolution under Low Excitation

The CIQTEK SEM5000Pro is a Schottky field emission scanning electron microscope (FE-SEM) specialized at high resolution even under low excitation voltage. Employing an advanced “Super-Tunnel” electron optics technology facilitates a crossover-free beam path together with an electrostatic-electromagnetic compound lens design.

These advancements reduce spatial charging effect, minimize lens aberrations, enhance imaging resolution at low voltage, and achieve a resolution of 1.2 nm at 1 kV, which allows for direct observation of non-conductive or semi-conductive samples, effectively reducing sample irradiation damage.

Key Features:

  • Low Voltage High Resolution
  • High Stability
  • In-lens Electron Detector
  • Optional Specimen Exchange Loadlock (8 inches compatible)
  • Electromagnetic Beam Deflection with Multi-hole Apertures
  • Excellent Expandability

Highlights:

★ “Super Tunnel” electron optics column technology/in-lens beam deceleration
Decrease spatial charging effect, ensuring low voltage resolution.

★ Crossover-free in the electron beam path
Effectively reduce lens aberrations and improve resolution.

★ Electromagnetic & electrostatic compound objective lens
Reduce aberrations, significantly improve resolution at low voltages, and enable observation of magnetic samples.

★ Water-cooled constant-temperature objective lens
Ensure the stability, reliability, and repeatability of the objective lens operation.

★ Variable multi-hole aperture with electromagnetic beam deflection system
Automatic switching between apertures without mechanical motion, allowing fast switching between imaging modes.

CIQTEK FESEM Microscope SEM5000Pro Specifications
Electron Optics Resolution 0.8 nm @ 15 kV, SE
1.2 nm @ 1.0 kV, SE
Acceleration Voltage 0.02kV ~ 30 kV
Magnificationn (Polaroid) 1 ~ 2,500,000 x
Electron Gun Type Schottky Field Emission Electron Gun
Specimen Chamber Camera Dual Cameras (Optical navigation + chamber monitor)
Stage Range X: 110 mm, Y: 110 mm, Z: 50 mm
T: -10°~ +70°, R: 360°
SEM Detectors and Extensions Standard Inlens Electron Detector
Everhart-Thornley Detector (ETD)
Optional Retractable Backscattered Electron Detector (BSED)
Retractable Scanning Transmission Electron Microscope(STEM)
Low Vacuum Detector(LVD)
Energy Dispersive Spectroscopy (EDS / EDX)
Electron Backscatter Diffraction Pattern (EBSD)
Specimen Exchange Loadlock (4 inch /8 inch)
Trackball & Knob Control Panel
Software Language English
Operating System Windows
Navigation Optical Navigation, Gesture Quick Navigation, Trackball (optional)
Automatic Functions Auto Brightness & Contrast, Auto Focus, Auto Stigmator

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