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CIQTEK SEM5000X
Ultra-high Resolution Field Emission Scanning Electron Microscopy (FESEM) Challenges the Limits
The CIQTEK SEM5000X is an ultra-high resolution FESEM with optimized electron optics column design, reducing overall aberrations by 30%, achieving ultra-high resolution of 0.6 nm@15 kV and 1.0 nm@1 kV. Its high resolution and stability make it advantageous in advanced nano-structural materials research, as well as the development and manufacturing of high-technology node semiconductor IC chips.
Key Features:
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CIQTEK SEM5000X
Ultra-high Resolution Field Emission Scanning Electron Microscopy (FESEM) Challenges the Limits
The CIQTEK SEM5000X is an ultra-high resolution FESEM with optimized electron optics column design, reducing overall aberrations by 30%, achieving ultra-high resolution of 0.6 nm@15 kV and 1.0 nm@1 kV. Its high resolution and stability make it advantageous in advanced nano-structural materials research, as well as the development and manufacturing of high-technology node semiconductor IC chips.
Key Features:
CIQTEK SEM5000X FESEM Microscope Specifications | ||
Electron Optics | Resolution | 0.6 nm @ 15 kV, SE |
1.0 nm @ 1 kV, SE | ||
Acceleration Voltage | 0.02kV ~30 kV | |
Magnification | 1 ~ 2,500,000 x | |
Electron Gun Type | Schottky Field Emission Electron Gun | |
Specimen Chamber | Cameras | Dual Cameras (optical navigation + chamber monitor) |
Stage Type | 5-Axis Mechanical Eucentric Specimen Stage | |
Stage Range | X=110 mm, Y=110 mm, Z=65 mm | |
T: -10*~+70°, R: 360° | ||
SEM Detectors and Extensions | Standard | In-lens Detector |
Everhart-Thornley Detector (ETD) | ||
Optional | Retractable Back-Scattered Electron Detector (BSED) | |
Retractable Scanning Transmission Electron Microscopy Detector (STEM) | ||
Low Vacuum Detector (LVD) | ||
Energy Dispersive Spectrometer (EDS / EDX) | ||
Electron Backscatter Diffraction Pattern (EBSD) | ||
Specimen Exchange Loadlock (4 inch / 8 inch) | ||
Trackball & Knob Control Panel | ||
Duo-Dec mode (Duo-Dec) | ||
User Interface | Languages | English |
Operating System | Windows | |
Navigation | Optical Navigation, Gesture Quick Navigation, Trackball (optional) | |
Automatic Functions | Auto Brightness & Contrast, Auto Focus, Auto Stigmator |
AVAILABLE IN STOCK
AVAILABLE IN STOCK
AVAILABLE IN STOCK
AVAILABLE IN STOCK