The COXEM EM-30N SEM is our most popular model of tungsten filament-based Tabletop SEM.
Featuring our 5th generation DSP (Digital Signal Processing) technology it delivers crystal-clear, low-noise images even at high magnification. Panorama Mode delivers wide-area scanning capability, while LV (Low Vacuum) gives you the ability to capture pristine, high-quality images of non-conductive samples without coating. The EM-30N is also the world’s first tabletop SEM that seamlessly integrates with compact EBSD, further elevating its versatility and performance.
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COXEM EM-30N SEM
The COXEM EM-30N is our most popular model of tungsten filament-based Tabletop SEM. Featuring our 5th-generation DSP (Digital Signal Processing) technology. The system delivers crystal-clear, low-noise images even at high magnification. Panorama Mode delivers wide-area scanning capability. LV (Low Vacuum) Mode gives you the ability to capture pristine, high-quality images of non-conductive samples without coating.
The EM-30N is the world’s first tabletop SEM that seamlessly integrates with compact EBSD. This elevates its versatility and performance.
| Electron gun | Tungsten filament (W) |
|---|---|
| Spatial resolution | < 5nm |
| Photo magnification | 15x to 150,000x |
| Display magnification | 15x to 150,000x |
| Accelerating voltage | 1 ~ 30kV |
| Sample stage | X: 35mm, Y: 35mm,
Tilt : 0 ~ 45° |
| Detector | SE, BSE* |
| Vacuum mode | HV, LV* |
| Vacuum system | Turbo pump (80L) + Rotary pump (100L) |
| Dimension (W × L × H) | 400(W) × 630(L) × 600(H)mm |
| Weight | 85kg |
| Features | Panorama v1
Autofocus Auto brightness & contrast Auto start Signal mixing Dual display & Save Line profile Image filtering Annotation tool ChamberCam |
| Data output format | JPEG, TIFF, BMP |
| Options* | BSE, EDS, EBSD, STEM
NaviCam, Coolstage LV (20Pa), VP (10 / 20 / 30Pa) Panorama v2, NanofiberScanner Diaphragm pump |
