The COXEM SPT-20 Ion Sputter Coater is a device used for coating conductive materials (Au, Pt, Pd, Pt-Pd) onto the sample surfaces by using the DC sputtering principle. Non-conductive samples are also used for observation under electron microscopes, and they are used to protect the sample surfaces from the injected electron beam and to help the electron flow. It can be used as an electrode formation of thin film type too.
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The COXEM SPT-20 Ion Sputter Coater is a device used for coating conductive materials (Au, Pt, Pd, Pt-Pd) onto the sample surfaces by using the DC sputtering principle. Non-conductive samples are also used for observation under electron microscopes, and they are used to protect the sample surfaces from the injected electron beam and to help the electron flow. It can be used as an electrode formation of thin film type too.
| Dimension & Weight | 420(W) × 220(L) × 230(H)mm, 10kg |
|---|---|
| Power consumption | AC 110 or 220V, 50/60 Hz, 300W |
| Chamber size | Ø100mm |
| Target size | 50mm |
| Target | Au, Pt, Pt-Pd |
| Maximum Ion voltage | 3kV |
| Ion current | 0 ~ 9mA |
| Coating time | 10 ~ 300sec |
| Pump | rotary pump (50L), 14kg |
