The Quorum Technologies Q150T Plus is optimised for use with a turbomolecular pump, which gives a lower vacuum down to 5 x 10-5 bar. This enables the sputtering of oxidising metals with a lower grain size suitable for high-resolution imaging. Similarly, lower scattering allows for high-purity, amorphous carbon films of high density.
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The Quorum Technologies Q150T Plus is optimised for use with a turbomolecular pump, which gives a lower vacuum down to 5 x 10-5 bar. This enables the sputtering of oxidising metals with a lower grain size suitable for high-resolution imaging. Similarly, lower scattering allows for high-purity, amorphous carbon films of high density.
Metal evaporation/aperture cleaning option available.
• High-resolution magnification SEM
• Protective platinum layers for FIB
• R&D of corrosion-, friction-, and wear protective layers
• Protective layers on medical devices
• BSE imaging
• EDX, WDS, EBSD analysis
• Carbon coating of replicas
These products are for Research Use Only.
Allows multiple users to input and store coating recipes, with a new feature to sort recipes per user according to recent use.
Intelligent system logic automatically detects which insert is in place and displays the appropriate operating settings and controls for that process.
The system prompts the user to confirm the target material and it then automatically selects appropriate parameters for that material.
Intuitive software allows the most inexperienced or occasional operator to rapidly enter and store their process data. For convenience, several typical sputtering and carbon coating profiles are already stored but also allow the user to create their own.
The software detects failure to achieve vacuum in a set period and shuts down the process in case of a vacuum leak, which ensures pump protection from overheating.
Careful evaporation allows precise control of carbon thickness (with or without the optional film thickness monitor). The quality of the resulting carbon films is also enhanced by the eradication of “sparking” which is a common feature of less advanced coaters.
For reproducible high-quality carbon films, we would recommend the use of shaped carbon rods. Rods are higher purity, less susceptible to debris and easier to control. Pulsed and ramped carbon rod recipes are supplied as standard.
The Q150T Plus has specimen stages to meet most requirements. All are easy-change, drop-in style (no screws) and are height adjustable (except for the rotary planetary stage).
Some examples:
Other options are available on request.
The Q150T Plus meets key industry CE standards
585 mm W x 521 mm D x 410 mm H (total height with
coating head open: 650 mm)
32 kg (packed: 42 kg)
725 mm W x 660 mm D x 680 mm H
Borosilicate glass 150 mm ID x 127 mm H
115.5 mm W x 86.4 mm H (active area), 640 RGB x 480
(display format), capacitive touch colour display
Full graphical interface with touch screen buttons,
includes features such as a log of the last 1000 coatings
and reminders for when maintenance is due
Disc-style 57 mm Ø. A 0.3 mm thick chromium (Cr) is
fitted as standard. T S and T ES versions only
50 mm Ø rotation stage with rotation speed of 8-20
rpm. Other stages available on request.
Rotary pump: 5 m3/hr two-stage rotary pump with oil
mist filter(order separately, see 13034)
Turbo pump: Internally mounted 67 L/sec N2, aircooled
Vacuum Measurement: Pirani gauge as standard. A
wide range gauge is available as an option
Ultimate vacuum: 5 x 10-5 mbar*
Sputter vacuum range: Between 5 x 10-3 and 1 x 10-1
mbar
*Typical ultimate vacuum of the pumping system in a clean
instrument after pre-pumping with dry nitrogen gas
Sputtering: Sputter current 1-150 mA to a
predetermined thickness (with optional FTM) or by
the built-in timer. The maximum sputtering time
is 60 minutes (without breaking vacuum and with
automatically built-in cooling periods)
Carbon evaporation: Carbon evaporation using rods/
cord. Thermal evaporation of metals from filaments
or boats. For cleaning TEM apertures a standard
molybdenum boat (supplied) can be fitted.
Visual status indicator
A large multi-colour status indicator light provides a visual
indication of the state of the equipment, allowing users to
easily identify the status of a process at a distance.
The indicator LED shows the following states:
• Initialisation
• Process running
• Idle
• Coating in progress
• Process completed
• Process ended in fault condition
Audio indication also sounds on completion of the process.
