Quorum Technologies Q300T TPlus is a large-chamber, turbo-pumped coating system, ideally suited for sputtering a single large-diameter specimen up to 8″/200mm, or multiple smaller specimens over a similar diameter.
Ideal for thin-film applications and SEM/FE-SEM. It is fitted with three sputtering heads to ensure even deposition of individual large specimens or multiple specimens.
NB: Please note it is not possible to sequentially sputter three different sputtering metals from each sputtering head – for sequential coating, see the Q300T D Plus.
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Quorum Technologies Q300T TPlus is a large-chamber, turbo-pumped coating system, ideally suited for sputtering a single large-diameter specimen up to 8″/200mm, or multiple smaller specimens over a similar diameter.
Ideal for thin-film applications and SEM/FE-SEM. It is fitted with three sputtering heads to ensure even deposition of individual large specimens or multiple specimens.
NB: Please note it is not possible to sequentially sputter three different sputtering metals from each sputtering head – for sequential coating, see the Q300T D Plus.
These products are for Research Use Only.
The Q300T T Plus is fitted with three individual sputtering heads to ensure even deposition of individual large specimens or multiple specimens. For economical coating of small specimens, the ‘single target’ mode can be selected. They are ideal coaters for the preparation of large specimens for examination by SEM, FEG-SEM. To ensure even deposition, the Q300 Plus series of coaters is fitted with a rotating specimen stage and three individual magnetron target assemblies, which enhance the efficiency of the process by using low voltages.
High vacuum turbo pumping allows sputtering of a wide range of oxidising and non-oxidising metals for thin film and electron microscopy applications. Automatic vacuum control, which can be pre-programmed to suit the process and material, therefore removing the need for manual intervention or control.
Sputter coating is a technique widely used in various applications; it is possible to create a plasma and sputter metals with high voltage, poor vacuum and no automation. However, this is not suitable for electron microscopy applications because it can heat the sample and result in damage when the plasma interacts with the sample. The Q series uses low-temperature enhanced-plasma magnetrons optimised for the turbomolecular pump pressures, combined with low current and deposition control, which ensures your sample is protected and uniformly coated.
The Q300T T Plus uses easy-change, 57 mm diameter, disc-style targets which are designed to sputter oxidising and noble metals. The Q300T T Plus is fitted as standard with a chromium (Cr) sputter target. Other target options include: Au, Au/Pd, Pt/Pd, Pd, Pt, Cu, Ir, W, ITO and Al, etc.
Aluminium (Al) rapidly forms an oxide layer, which can be difficult to remove. The Q300T T Plus has a special recipe for aluminium that reduces the oxide removal time and prevents excessive pre-sputtering of the target.
The Q300T T Plus can be fitted with an optional film thickness monitor, which measures the coating thickness on a quartz crystal monitor within the chamber, in order to control the coating thickness of material deposited onto the sample.
| Instrument case |
| 590mm W x 535mm D x 420mm H (maximum height during the opening of the coating head: 772mm) |
| Weight |
| 36 kg (packed: 59kg) |
| Packed dimensions |
| 730 mm W x 630 mm D x 690 mm H |
| Work chamber |
| Borosilicate glass with integral PET implosion guard, Size 300 mm outside diameter x 127 mm High |
| Display |
| 115.5mm W x 86.4mm H (active area), 640 RGB x 480 (display format), capacitive touch colour display |
| User interface |
| Full graphical interface with touch screen buttons, includes features such as a log of the last 1000 coatings and reminders for when maintenance is due |
| Specimen stage |
| A flat rotation stage for 6”(150mm) and 8” (200mm) wafers is fitted as standard. |
| A rotating/tilt stage and the ‘rota cota’ rotary tilt stage are also options |
| Vacuum |
| Rotary pump: Rotary pump – 4 m3/hr, two-stage rotary pump with oil mist filter for the Q300T T Plus |
| Turbo pump: Turbo pump – Internally mounted 70L/sec air-cooled |
| Vacuum Measurement: Pirani gauge as standard, wider range gauge available as an option |
| Ultimate vacuum: 5 x 10-5mbar* |
| Sputter vacuum range: 5×10-2 to 5×10-3 mbar* |
| *Typical ultimate vacuum of the pumping system in a clean instrument after pre-pumping and venting with dry nitrogen gas |
| Processes |
| Sputter Deposition Current: |
| Single target: 1 – 150mA |
| All targets: 60 – 420mA |
| Visual status indicator |
| A large status multi-colour indicator light provides a visual indication of the state of the equipment, allowing users to easily identify the status of a process at a distance. |
| The indicator LED shows the following states: |
| • Initialisation |
| • Process running |
| • Idle |
| • Coating in progress |
| • Process completed |
| • Process ended in a fault condition |
| Audio indication also sounds on completion of the process. |
| Services |
| Gases: process gas argon, 99.999% Nominal 5 psi |
