ZEPTOOLS Technology’s SEM Nano-Probe Station achieves precise positioning in three-dimensional space. This offers advantages such as small size with large travel range, high precision, and ease of operation.

Moreover, it is compatible with high vacuum environments. This makes it an essential in-situ accessory for scanning electron microscopes.

Depending on experimental requirements, electrical probes can be replaced with various manipulation tools and measurement heads. These include fibre optic probes, nanotweezers, and microinjectors.

The three-axis probe stage is composed of three single-axis motion stages. In fact, multiple three-axis probe stages can be installed within a single SEM chamber. The platform supports the installation of various manipulation and measurement heads. These include electrical probes, fibre optic probes, nanotweezers, diamond nanoindenters, and microinjectors. This enables precise micro- and nano-manipulation and measurement.

Standard configuration includes: probe body, base compatible with SEM/FIB, vacuum flange, probe controller, and control handle.

Optional configurations: cryogenic or high-temperature sample stages, fibre optic clamps and fibre optic vacuum feedthroughs, EBIC (Electron Beam Induced Current) kits.

Product Features:

• Compact structure with high rigidity
• Zero backlash, high-precision flexible hinge guidance system
• Piezoelectric ceramic displacement platform with ultra-long service life
• Internal position feedback can be added based on demand

Applications:

• Manipulation of nanomaterials
• Electrical and optoelectronic property measurements of nanodevices.
• DNA manipulation of biological cells, etc.

Compatible SEM models:

• JEOL, Hitachi, FEI, TESCAN, etc.