in-situ MEMS-TEM-STM Multi-Field Measurement System

PicoFemto in-situ MEMS-TEM-STM Multi-Field Measurement System, which is an in-situ transmission electron microscope experimental system, enables researchers to construct a controlled multi-field environment (including force, heat, light, electricity, etc.) in a transmission electron microscope, to achieve in-situ characterisation of samples, such as materials or devices, under multiple excitations.

STM Multi-Field Measurement – Performance Indicators

  • Transmission electron microscope indicators: Compatible with specified electron microscope models and pole shoes. Optional dual-tilt version, dual-tilt electrical measurement sample rod, Y-axis inclination ± 25 ° (also limited by the pole shoe spacing)
  • Electrical measurement indicators: Includes a current-voltage test cell
  • Current measurement range: 1 nA-30 mA, 9 ranges
  • Current resolution: better than 100 fA
  • Voltage output range: ±10 V in normal mode, ±150 V in high voltage mode. Automatic current-voltage (I-V) measurement. Current-time (I-t) measurement, automatic saving.
  • Scanning probe manipulation indicator: Coarse adjustment range: XY direction 2.5 mm, Z direction 1.5 mm
  • Fine adjustment range: 18 um in XY direction, 1.5 um in Z direction
  • Fine adjustment resolution: 0.4 nm in XY direction, 0.04 nm in Z direction.
  • Fibre index: Multi-mode optical fibre outer diameter 250 um, to ensure the vacuum index of the electron microscope system. Optional fibre probe, flat head fibre. Equipped with a fast SMA connector and an FC connector

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PicoFemto in-situ MEMS-TEM-STM Multi-Field Measurement System, which is an in-situ transmission electron microscope experimental system, enables researchers to construct a controlled multi-field environment (including force, heat, light, electricity, etc.) in a transmission electron microscope, to achieve in-situ characterisation of samples, such as materials or devices, under multiple excitations.

STM Multi-Field Measurement – Performance Indicators
  • Transmission electron microscope indicators: Compatible with specified electron microscope models and pole shoes. Optional dual-tilt version, dual-tilt electrical measurement sample rod, Y-axis inclination ± 25 ° (also limited by the pole shoe spacing)
  • Electrical measurement indicators: Includes a current-voltage test cell
  • Current measurement range: 1 nA-30 mA, 9 ranges
  • Current resolution: better than 100 fA
  • Voltage output range: ±10 V in normal mode, ±150 V in high voltage mode. Automatic current-voltage (I-V) measurement. Current-time (I-t) measurement, automatic saving.
  • Scanning probe manipulation indicator: Coarse adjustment range: XY direction 2.5 mm, Z direction 1.5 mm
  • Fine adjustment range: 18 um in XY direction, 1.5 um in Z direction
  • Fine adjustment resolution: 0.4 nm in XY direction, 0.04 nm in Z direction.
  • Fibre index: Multi-mode optical fibre outer diameter 250 um, to ensure the vacuum index of the electron microscope system. Optional fibre probe, flat head fibre. Equipped with a fast SMA connector and an FC connector
Heating index:
  • Temperature range: room temperature to 1000 ℃;
  • Temperature accuracy better than 5%;
  • Temperature stability: better than ± 0.1 ℃.

Application Scenarios: By simply changing the type of MEMS chip and applying up to four excitations to the samples with different STM probes, it can realise a variety of complex test functions and complete previously unattainable research.

  • High-temperature stretching/compression (heated chip + electrical STM probe);
  • Thermal electron emission/field emission (heated chip + electrical STM probe);
  • Three-terminal device measurement (electrical chip + electrical STM probe);
  • Study of electroluminescence phenomena (electrical chip + optical STM probe);
  • Photoelectric phenomenon research (electrical chip + optical STM probe).
System Features High-stability

Easily obtain high-resolution images in large-scale motion, suitable for a wider range of application scenarios and sample systems.

Ultra-long Lifetime

The patented technology (Patent type: Utility model (Electron microscope in-situ sample holder with high-resolution multi-dimensional manipulation and electrical measurement) Patent No.: 202020944865.4) “claw-ball” structure of the probe rod is recognised as a durable and robust probe rod due to its unique structural design.

Ultra-low Maintenance Costs

The equipment’s tip preparation system allows for the cost-effective preparation of tip consumables. The “claw-ball” micromotion structure has been realised in modular mass production with low maintenance cost.

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