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ZP3-4 Microprobe Station
The ZP3-4 Micronanometer Probe Stage allows electrical characterisation of samples and test equipment at the nanometer scale.
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ZP3-4 Microprobe Station
The ZP3-4 Micronanometer Probe Stage allows electrical characterisation of samples and test equipment at the nanometer scale.
Fast, accurate and stable – contains 4 piezoelectric triaxial probe arms, each of which is equipped with a detachable electrical probe interface, which can perform macroscopic motion on millimeter scale and realize microscopic motion on a nanometer scale.
Diversified usage scenarios – The ZP3-4 micro and nano probe stage has a compact structure, occupies little space, and has a large motion stroke. Therefore, it can be matched with various microscope sample stages, vacuum chambers, optical test benches and other working conditions.
Perfect technical solutions – ZP3-4 micro-nano probe stage and Nikon metallurgical microscope / SR-Scopel integrated to form the probe stage electrical measurement system. It provides a specific solution for macro travel on the micro-scale electrical and characterisation measurements.
Intuitive and convenient – controlled by a handle with multi-level macro-speed regulation, pulse motion, and displacement fine-tuning functions. Moreover, macro-motion speed spanning 5um/s~2mm/s, single-point pulse advance up to 300nm or less, and fine-tuning motion resolution of less than 1nm, make the operation more intuitive, convenient, and accurate under the microscope.
Highly integrated – equipped with a perfect optical microscope module. It is also equipped with brightness adjustment, gain and zoom, etc. After connecting with a computer, it can realise the routine functions such as image snapshots, size measurement, labelling, and video recording.