ZP3-4 Microprobe Station

ZP3-4 Microprobe Station

The ZP3-4 Micronanometer Probe Stage allows electrical characterisation of samples and test equipment at the nanometer scale.

Product Parameters
  • Number of probes: 4 probes, each probe is equipped with a three-axis probe arm
  • Degrees of freedom: each probe is independently driven (X, Y, Z, three degrees of freedom).
  • Motion: piezoelectric drive;
  • Stepping speed: 2 mm/s (X, Y, Z);
  • Motion range: 20x20mm (X, Y), 10mm (Z);
  • Motion resolution: 1 nm (X, Y), 10 nm (Z);
  • Probe specifications: needle shank diameter of 0.51mm (0.020”)

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ZP3-4 Microprobe Station

The ZP3-4 Micronanometer Probe Stage allows electrical characterisation of samples and test equipment at the nanometer scale.

Product Parameters
  • Number of probes: 4 probes, each probe is equipped with a three-axis probe arm
  • Degrees of freedom: each probe is independently driven (X, Y, Z, three degrees of freedom)
  • Motion: piezoelectric drive
  • Stepping speed: 2 mm/s (X, Y, Z)
  • Motion range: 20x20mm (X, Y), 10mm (Z)
  • Motion resolution: 1 nm (X, Y), 10 nm (Z)
  • Probe specifications: needle shank diameter of 0.51mm (0.020”)
Product Advantages

Fast, accurate and stable – contains 4 piezoelectric triaxial probe arms, each of which is equipped with a detachable electrical probe interface, which can perform macroscopic motion on millimeter scale and realize microscopic motion on a nanometer scale.

Diversified usage scenarios – The ZP3-4 micro and nano probe stage has a compact structure, occupies little space, and has a large motion stroke. Therefore, it can be matched with various microscope sample stages, vacuum chambers, optical test benches and other working conditions.

Perfect technical solutions – ZP3-4 micro-nano probe stage and Nikon metallurgical microscope / SR-Scopel integrated to form the probe stage electrical measurement system. It provides a specific solution for macro travel on the micro-scale electrical and characterisation measurements.

Intuitive and convenient – controlled by a handle with multi-level macro-speed regulation, pulse motion, and displacement fine-tuning functions. Moreover, macro-motion speed spanning 5um/s~2mm/s, single-point pulse advance up to 300nm or less, and fine-tuning motion resolution of less than 1nm, make the operation more intuitive, convenient, and accurate under the microscope.

Highly integrated – equipped with a perfect optical microscope module. It is also equipped with brightness adjustment, gain and zoom, etc. After connecting with a computer, it can realise the routine functions such as image snapshots, size measurement, labelling, and video recording.

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